Figure 17
Growth of a carboneous layer on the substrate with the parabolic feature of 1.5 nm maximal height. The grazing angle of incident radiation (λ = 20 nm) is varied from θ = 1° to 10°. Parameter = 0.75 such that the probability of polymerization on a flat surface is changed from P0 = 1.56% at θ = 1° to P0 = 75.0% at θ = 10°. The values of θ and P0 are shown in the figures. The ratio Pdes/Pdif = 3/1 was fixed. The cubic size was a = 0.25 nm. The same sets of random numbers {j} and {p} were used when calculating different films. The profiles were averaged over 10 nm intervals along the X-axis. |