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Figure 11
Wavefront sensor measurements of the KB focus in zero-order monochromator operation. Vertical and horizontal waist positions and sizes were measured as a function of M7 pitch angle (keeping M8 fixed). (a) Absolute distance of the waists to the wavefront sensor (red: vertical; black: horizontal) and (c) waist sizes in FWHM. Measurements were performed at 13.5 nm with the PG monochromator in zero order.

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