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Figure 12
Wavefront sensor measurements of the KB focus in first-order monochromator operation. Vertical and horizontal waist positions and sizes were measured as a function of M7 pitch angle. (a) Absolute distance of the waists to the wavefront sensor (red: vertical; black: horizontal) and (b) FWHM waist sizes. Measurements were performed at 13.5 nm, the PG monochromator in first order (cff = 2), exit slit width 20 µm. A minimum vertical focus size of (5.8 ± 1) µm FWHM has been achieved.

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