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Figure 9
Focusing properties of the KB optics as a function of M7 pitch variation (a, b) and M8 pitch variation (c, d). The graphs show the longitudinal position of the vertical and horizontal foci together with the corresponding waist size in FWHM. For each mirror pitch variation the corresponding other mirror setting was kept fixed. Measurements were performed at 13.5 nm with the PG monochromator in zero order.

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