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Figure 3
Height profiles and height errors for (a) MS1 and (b) MS2, as obtained by subtracting the ideal parabolic curve for p = 0.127 mm from the measured height profiles. |
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Figure 3
Height profiles and height errors for (a) MS1 and (b) MS2, as obtained by subtracting the ideal parabolic curve for p = 0.127 mm from the measured height profiles. |