Simultaneous X-ray fluorescence and scanning X-ray diffraction microscopy at the Australian Synchrotron XFM beamline

Jones, M.W.M.; Phillips, N.W.; Riessen, G.A. van; Abbey, B.; Vine, D.J.; Nashed, Y.S.G.; Mudie, S.T.; Afshar, N.; Kirkham, R.; Chen, B.; Balaur, E.; de Jonge, M.D.

doi:10.1107/S1600577516011917

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Figure 2
SXDM (a) and XFM maps for Cr (b) and Au (c) of the test pattern in step-scan mode, with zoomed regions in (d)–(f) taken from the box in (a). The increased resolution in the SXDM image is clear, with fine features clearly resolved that are not visible in the fluorescent images. A region of increased Cr fluorescence where the fabrication process failed to remove part of the patterned Cr film is visible in (e), highlighted with the dotted circle. The scale bar in (a) is equal to 10 µm.

JOURNAL OF
SYNCHROTRON
RADIATION

ISSN: 1600-5775

Volume 23| Part 5| September 2016| Pages 1151-1157

https://doi.org/10.1107/S1600577516011917

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