Figure 5
Line profiles (a) comparing the step and fly scans (solid and dashed line in each case) at the position indicated by the line in Fig. 4(a). Both profiles are in good agreement. The derivative of the line profiles and the Gaussian-fitted FWHM of the four steps are shown in (b). We obtain an estimate of the resolution from the mean of the four FWHM at 102 nm and 110 nm for the step and fly scans, respectively. |