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Figure 6
The optical slope error of the bimorph mirror was reduced from 2.3 µrad at zero voltage (orange, dash-dot) to 0.2 µrad (solid, black) in three iterations. |
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Figure 6
The optical slope error of the bimorph mirror was reduced from 2.3 µrad at zero voltage (orange, dash-dot) to 0.2 µrad (solid, black) in three iterations. |