Calibration of a compact XUV soft X-ray monochromator with a digital autocollimator in situ

Yuh, J.-Y.; Lin, S.-W.; Huang, L.-J.; Lee, L.-L.

doi:10.1107/S1600577516009565

Journal of Synchrotron Radiation Journal of
Synchrotron Radiation

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Figure 3
(a) Fine step scan of the grating angle between 5 and 11 µrad within 1 h. (b) Zoom of one cycle from (a); the increments of the linear encoder steps (red line) are compared with the measuring angle of the grating surface with the autocollimator (scattered dots). (c) Standard deviation of stability in both directions.

JOURNAL OF
SYNCHROTRON
RADIATION

ISSN: 1600-5775

Volume 23| Part 5| September 2016| Pages 1232-1236

https://doi.org/10.1107/S1600577516009565

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