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![[Figure 2]](hf5320fig2mag.jpg)
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Figure 2
SEM (top) and XRM (bottom) images of the Siemens star test pattern. The line widths are 50–100 nm in the innermost circle and 100–200 nm in the second circle. |
![[Figure 2]](hf5320fig2.jpg)
 | JOURNAL OF SYNCHROTRON RADIATION |
ISSN: 1600-5775
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Figure 2
SEM (top) and XRM (bottom) images of the Siemens star test pattern. The line widths are 50–100 nm in the innermost circle and 100–200 nm in the second circle. |
| JOURNAL OF SYNCHROTRON RADIATION |
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