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Figure 1
Piezo response functions (PRF), displayed as slope changes scaled linearly to a voltage change of 500 V for easy comparison, showing how each of the eight channels of a super-polished bimorph mirror affects the mirror's surface, as measured by the Diamond-NOM profilometer (Alcock et al., 2010BB1). The thick black curve shows the mirror's slope error (deviation from nominal ellipse) when all electrodes are at 0 V. The PRFs and the residual surface errors dictate the breakpoint locations of the re-entrant surface modifications.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 23| Part 6| November 2016| Pages 1333-1347
https://doi.org/10.1107/S1600577516013308
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