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Figure 3
(a) Bottom to top: mirror slope error at 0 V, then theoretical three-, five- and seven-segment surface modifications to try to mimic the slope error at 0 V. Each plot has been shifted upward by 5 µrad from the one before for easy comparison. (b) Theoretical simple concave surface modification with expected best approximation achieved by mirror as calculated from its slope error at 0 V and its measured PRFs. The calculated voltage settings first remove the polishing errors and then add the desired modification. Intended beam size is 4 µm for all cases. |
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