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Figure 5
XDMs are inspected with our stitching Shack–Hartmann system in the NSLS-II metrology laboratory.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 23| Part 6| November 2016| Pages 1348-1356
https://doi.org/10.1107/S1600577516014600
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