Figure 7
Intensity distribution at the image plane calculated using the MOI model (solid lines), HYBRID (dashed lines) and the multi-electron SRW (dotted lines) with different BDA sizes of (a, b) 10.5 µm, (c, d) 31.5 µm and (e, f) 84 µm. Plots (a), (c) and (e) are calculated by using an ideal elliptical cylinder, while (b), (d) and (f) included the figure error profile shown in Fig. 6(b). The insets show enlarged regions of the intensity profiles. The number of elements used in the MOI calculation are 3000, 300, 300, 300 and 100 at the source, BDA, HFM incident, HFM exit and image planes, respectively. |