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Figure 7
Intensity distribution at the image plane calculated using the MOI model (solid lines), HYBRID (dashed lines) and the multi-electron SRW (dotted lines) with different BDA sizes of (a, b) 10.5 µm, (c, d) 31.5 µm and (e, f) 84 µm. Plots (a), (c) and (e) are calculated by using an ideal elliptical cylinder, while (b), (d) and (f) included the figure error profile shown in Fig. 6(b) ![]() |