|
|
|
Figure 3
Intensity profiles of photon beams at 60 nm wavelength, measured by the pinhole scan. The intensity profiles along the (a) horizontal and (b) vertical axes are derived from the two-dimensional distributions shown in Fig. 2 . |
|
|
|
Figure 3
Intensity profiles of photon beams at 60 nm wavelength, measured by the pinhole scan. The intensity profiles along the (a) horizontal and (b) vertical axes are derived from the two-dimensional distributions shown in Fig. 2 . |