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Figure 3
(a) Ta L-line X-ray fluorescence map of the selected region of interest collected at 9990 eV incident photon energy. (b) Detail of (a) with a horizontal edge of the Ta pattern with averaged intensity of all maps collected above the Ta L-edge as marked in (a) by the white box. (c) Line plot as marked in (b) of the averaged data (black) and a line plot of a single energy (9900 eV, red) and the corresponding first derivatives and fits of a Gaussian beam profile demonstrating the spatial resolution of the measurement.

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