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Figure 4
(a)–(c) Ta intensity map of the selected region of interest on the test pattern with the three different scanning sequences of the energy axis. (a) Energy as the inner axis, (b) energy as the middle axis, (c) energy as the outer axis. (d)–(f) Corresponding chemical phase map after linear combination fitting of the single-pixel XANES with metallic Ta (red) and Ta2O5 (green).

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