Figure 4
The point spread function simulated with physical attenuation at each lens (lens-by-lens simulation), compared with using an effective aperture placed at the last lens in the CRL stack. The figure shows the intensity (a), intensity error (b), phase (c) and phase error (d). We see a small phase difference between the two procedures, which is equivalent to the focusing point being moved about 150 nm away from the sample, and is likely due to numerical errors accumulating in the stepwise simulation. Simulation details: 2D wavefront, 1000 × 1000 pixels, 1 nm pixel size; see also `Example_Figure_4.m' of Pedersen (2017). The plots are cross sections perpendicular to the optical axis. |