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Figure 3
Development rates as a function of dose deposition using white light (top curve, 200 µm-thick PMMA foil), and using the double-mirror system set to 6 mrad, 9 mrad or 12 mrad for 100 µm-thick foils. Dose values were determined by Lex-D, assuming `ideal' mirror conditions (clean Cr surface, 0.5 nm rough).

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