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Figure 9
Measured development rates as a function of simulated dose deposition using white light and using the double-mirror system set to 6 mrad, 9 mrad or 12 mrad. Left: dose values determined by Lex-D, assuming `ideal' mirror conditions (clean Cr surface, 0.5 nm rough). Center: corrected dose values determined with the newly developed simulation tool, assuming a Cr surface, 25 nm Cr2O3 and 50 nm of carbon (all layers 0.5 nm rough). Right: corrected dose values determined with the newly developed simulation tool, assuming a Cr surface, 25 nm Cr2O3 and 100 nm of carbon (all layers 0.5 nm rough).

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 25| Part 3| May 2018| Pages 729-737
https://doi.org/10.1107/S1600577518004939
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