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Figure 5
SEM images of the N-UNCD film from UNCD I illustrating (a) the nanocrystalline grain, (b) a smooth surface with spherical colonies from secondary nucleation, (c) microstructures of the sidewalls after RIE and (d) the profile of the etched sidewall.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
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