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Figure 1
Map of the expected beam position on the pixel (128, 206). A 5 µm × 5 µm beam illuminates the studied pixel head on. Position 1 represents the initial beam position, which is meant to be at the intersection of four pixels. The detector is then moved by increments of 5 µm as represented by the position numbers on the figure. These position numbers are referred to as the subpixel beam-position index.

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ISSN: 1600-5775
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