Figure 5
The measured steps can be inferred from Fig. 1, where the first measured step along the x direction and its error bar are the mean and standard deviation of the following steps: (1 to 2), (9 to 10), (17 to 18), (25 to 26), (33 to 34), (41 to 42), (49 to 50) and (57 to 58). Similarly, the second measured step and its error bar are the mean and standard deviation of the following steps: (2 to 3), (10 to 11), (18 to 19), (26 to 27), (34 to 35), (42 to 43), (50 to 51) and (58 to 59). The x-axis represents the expected position of the beam inside the pixel where position 0 µm is the pixel edge (pixel start) and 27.5 µm is the pixel center. The initial position of the beam is not always at the start of the pixel as concluded from Fig. 4, hence the positions were adjusted using the first beam position as measured in Fig. 4. |