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Figure 6
(a) Intensity profiles at the BPM position with different exit-slit sizes; the curves are experimental results obtained by BPM scanning and the dots are simulation results obtained using the MOI model. (b) Coherence-degree profile at the BPM position. (c) Fringe-intensity profile at the exposure area, both at an exit-slit size of 40 µm.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
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