Towards chemically neutral carbon cleaning processes: plasma cleaning of Ni, Rh and Al reflective optical coatings and thin Al filters for free-electron lasers and synchrotron beamline applications

Moreno Fernández, H.; Zangrando, M.; Sauthier, G.; Goñi, A.R.; Carlino, V.; Pellegrin, E.

doi:10.1107/S1600577518014017

Journal of Synchrotron Radiation Journal of
Synchrotron Radiation

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Figure 1
Ni, Rh, Al and Au metal foils of micrometric thickness installed on a common foil sample holder for plasma treatment. Left: metal foil sample holder before plasma cleaning, including a 50 nm a-C coating. Right: metal foil sample holder after plasma cleaning.

JOURNAL OF
SYNCHROTRON
RADIATION

ISSN: 1600-5775

Volume 25| Part 6| November 2018| Pages 1642-1649

https://doi.org/10.1107/S1600577518014017

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