Towards chemically neutral carbon cleaning processes: plasma cleaning of Ni, Rh and Al reflective optical coatings and thin Al filters for free-electron lasers and synchrotron beamline applications

Moreno Fernández, H.; Zangrando, M.; Sauthier, G.; Goñi, A.R.; Carlino, V.; Pellegrin, E.

doi:10.1107/S1600577518014017

Journal of Synchrotron Radiation Journal of
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Figure 7
Raman spectra from different carbon contamination. Red solid line: carbon footprint on EUV Al filter foil upstream side. Black solid line: a-C thin film from e-beam carbon deposition. Blue solid line: carbon footprint on EUV Al filter foil downstream side. Green solid line: carbon footprint on Au-coated from SRC soft X-ray beamline.

JOURNAL OF
SYNCHROTRON
RADIATION

ISSN: 1600-5775

Volume 25| Part 6| November 2018| Pages 1642-1649

https://doi.org/10.1107/S1600577518014017

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