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Figure 8
RGA time trend from the N2/H2 plasma during the plasma cleaning of the EUV Al foil filters. The complete time span of the RGA trend plot corresponds to about 4 h and 50 minutes (i.e. roughly 90 s per scan number increment).

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 25| Part 6| November 2018| Pages 1642-1649
https://doi.org/10.1107/S1600577518014017
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