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Figure 7
Fast mapping of sample patterns. (a) Scanning electron microscope image of CoPd sub-micrometre objects on a Si3N4 membrane, taken after FIB milling. The white scale-bar is 20 µm. (b) 2D fast mapping of the same sample area using the piezo motors and the transmission diode of the Comet chamber. (c, d) Zooms of the identified objects.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 26| Part 1| January 2019| Pages 280-290
https://doi.org/10.1107/S1600577518016612
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