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Figure 1
Full-field XRF imaging of a commercial-resolution target sample. (a) An optical photograph of the resolution target. The black rectangular patterns are chromium coatings. The XRF imaging area is enclosed by the circle and the scale bar is 500 µm. (b) Full-field XRF spectra accumulated for 6 h. (c) An XRF image of Cr Kα and Kβ.

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ISSN: 1600-5775
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