Figure 2
Older microfocus bimorphs were typically secured in opto-mechanical holders using PEEK clamps [panel (a), showing Mirror 2 from Table 1]. The non-kinematic nature and flexibility of the PEEK clamps meant that the curvature of such mirrors often drifted by a few percent over several hours. To improve bending stability, a three-point spring-loaded kinematic clamping system was developed by S.RI. Tech [panel (b), showing Mirror 3]. |