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Figure 2
(a) Top view of an SEM image of the linear grating with a pitch of 150 nm and support structure for stability of the grating lines. (b) Side view SEM image taken at a 45° titled angle of the linear grating with a pitch of 150 nm and a depth of 1.2 µm.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 26| Part 3| May 2019| Pages 708-713
https://doi.org/10.1107/S1600577519003382
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