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Figure 4
Calculation of the illumination distribution pattern on the grating G1 for an EM misaligned at the γ rotation by γ = 0.3 mrad. (a) Ray-tracing computation realized with ShadowOui. (b) Wavefront calculation realized with WPG. |
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Figure 4
Calculation of the illumination distribution pattern on the grating G1 for an EM misaligned at the γ rotation by γ = 0.3 mrad. (a) Ray-tracing computation realized with ShadowOui. (b) Wavefront calculation realized with WPG. |