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Figure 5
Comparison of scanned monochromatic 3DXM measurements and calculations of surface normal strain in a 25 µm-thick silicon plate bent elastically to a radius of 3 mm. The inset shows the sharply peaked Bragg intensity as a function of monochromator energy and depth along the microbeam in the bent plate. Adapted from Yang et al. (2003BB57) with permission.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 46| Part 1| December 2013| Pages 153-164
doi:10.1107/S0021889812043737
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