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![[Figure 2]](nb5161fig2mag.jpg)
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Figure 2
A schematic description of the X-ray nanodiffraction experiment performed using a beam of 100 nm in diameter on an isolated TSV in transmission geometry. Two scans along the y axis were performed at the z positions denoted as A and AT, with a step of 100 nm, and the diffraction signal was collected using a two-dimensional detector. θ and δ denote radial and azimuthal positions of the W reflections, respectively. |
![[Figure 2]](nb5161fig2.jpg)
 | JOURNAL OF APPLIED CRYSTALLOGRAPHY |
ISSN: 1600-5767
