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Figure 6
Real part of the index of refraction n based on the results of the optimized parameters listed in Table 2[link] for the combined analysis for a selected wavelength. The gradual interface model is shown in direct comparison with the binary model optimized for the EUV reflectance curve over three full periods. The resulting strong asymmetry in the width of the interface regions is clearly visible (see text). The grey and white shaded areas indicate the Cr and Sc layers, respectively, for the binary model.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 49| Part 6| December 2016| Pages 2161-2171
https://doi.org/10.1107/S1600576716015776
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