Machine learning assisted nanobeam X-ray diffraction based analysis on hydride vapor-phase epitaxy GaN

Wu, Z.; Hayashi, Y.; Tohei, T.; Sumitani, K.; Imai, Y.; Kimura, S.; Sakai, A.

doi:10.1107/S1600576725004169

Journal of Applied Crystallography Journal of Applied
Crystallography

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Figure 7
Fit quality metrics for traditional Gaussian fits. Results are calculated for (a) $[2 {\overline 2} 02]$ and (b) $[2 {\overline 2} 00]$ . For each plot, averaged metrics calculated for ω, 2θ and φ intensities are colored accordingly.

JOURNAL OF
APPLIED
CRYSTALLOGRAPHY

ISSN: 1600-5767

Volume 58| Part 4| August 2025| Pages 1205-1219

https://doi.org/10.1107/S1600576725004169

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