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Figure 3
Results of sample alignment positions in grazing-incidence geometry. (Left) At different θ–2θ positions, the height z of the sample, which consists of a 10 × 10 µm Au island on a Si wafer, was scanned and the maximum reflected intensity was determined. The result of fitting equation (2) is shown as a solid line (black); fit parameters are listed in Table 1[link]. The fit result using equation (4) is nearly identical and therefore not shown. The inset shows a scanning electron microscopy (SEM) image of the square Au island (scale bar represents 10 µm). (Right) Lateral sample positions (symbols) whereby an approximately 100 µm polycrystalline Pt marker was aligned in the beam at grazing angle θ and the Pt 111 (powder) Bragg reflection recorded. A fit of equation (1) is shown as a solid line (black); fit parameters are listed in Table 1[link]. The fit result using equation (3) is nearly identical and therefore not shown. The inset shows an SEM image of the elliptical Pt marker (scale bar represents 100 µm).

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 58| Part 6| December 2025| Pages 1978-1985
https://doi.org/10.1107/S1600576725008179
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