Modified crystallite group method for residual stress analysis of highly textured Cu/Mo nanomultilayers

Yeom, J.; Cancellieri, C.; Sharma, A.; Rheingans, B.; Maeder, X.; Abadias, G.; Janczak-Rusch, J.

doi:10.1107/S1600576726003638

Journal of Applied Crystallography Journal of Applied
Crystallography

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Figure 5
Specimen coordinate system P, orientation-dependent crystallographic coordinate system $[{\rm X}']$ and laboratory coordinate symtem L for (a) Cu and (b) Mo. (c) Plane view of an experimental sample with coordinates of specimen P for Cu and Mo when β = 0° (the $[{\rm X}']$ and P axes are aligned). Sharing a common $[{\rm X}_3^{\rm Cu, Mo}]$ axis (sample normal), the Mo crystallographic coordinate system is oriented 30° clockwise relative to the Cu system about this axis. For the Mo layer, the coordinate system P^Mo is defined following convention and to remain consistent with the reference, such that stresses are evaluated in a frame rotated with respect to P^Cu according to the crystallographic OR between Cu and Mo. In this framework, the stress tensor of each layer is determined with respect to its corresponding coordinate system. Although referred to as a specimen coordinate system by convention, P^Mo should be understood as a layer-specific reference frame used for stress evaluation.

JOURNAL OF
APPLIED
CRYSTALLOGRAPHY

ISSN: 1600-5767

Volume 59| Part 3| June 2026| Pages 910-922

https://doi.org/10.1107/S1600576726003638

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