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Figure 1
Sample and measurement procedure. (a) Illustration of the lamella and focused beam. (b) The measurement procedure of one area. One scan consists of 20 lines measured continuously. The 100 nm vertical steps give a line distance of 40 nm as the beam is 60 nm in this direction, as shown in the green rectangle. (c) Illustration of a section of the PAA sample (NW: nanowire). |

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