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Figure 5
Manufacturing specifications for a single FZP objective in terms of outermost zone width Δr as a function of magnification for three materials. The corresponding NA is shown. Moreover the required ARs of the outermost zone for three materials for maximum efficiency are shown. The example relates to a fixed diameter D = 4 mm, wavelength λ = 4 Å and an experimental laboratory allowing L = 8 m. |
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