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A novel monitor for X-ray beam position, intensity and profile is presented. This diagnostic instrument is based on a commercial photodiode array which detects X-rays scattered diffusely from a featureless foil. The typical accuracy with which the beam position is determined is 1 µm. Although initially conceived for the characterization of `white' synchrotron radiation, this monitor has proven to be suitable for monochromatic radiation as well, hence providing a single solution to the task of beam characterization along the X-ray beam path, from source to sample.
Keywords: X-ray beam-position monitors.