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A lattice-parameter measurement technique using two lattice planes and monochromatic X-ray beams has been investigated. Accuracy, measurement correction and extensions of the technique are discussed. With this technique, the lattice parameters of Gd3Ga5O12, single crystals, grown under different conditions, have been measured to an accuracy of ±0.0003 Å. From the results obtained for Gd3Ga5O12, single crystals, it has been found that the technique has several advantages in comparison with conventional methods.
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