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The structure of cubic transition metal compounds VC1 - x, NbC1 - x, TiC1 - x, VN1 - x and TiN1 - x has been studied by electron diffraction. These compounds occur with large deviations from the stoichiometric composition and the carbides have been observed with long-range ordered carbon distributions for certain compositions and temperatures. For crystals of other compositions and temperatures electron diffraction patterns frequently contain diffuse bands of intensity which have a periodic distribution with respect to the reciprocal lattice points. The diffuse intensity follows a continuous surface of complex curvature in reciprocal space, is observed for all compounds except VN1 - x, and has the symmetry of the b.c.c. reciprocal lattice. These features indicate a short-range ordered non-stoichiometric vacancy distribution which is analysed in Part II of this series [Sauvage & Parthé (1972), Acta Cryst. A28, 607].