High-resolution transmission electron microscopic investigations of molybdenum thin films on faceted α-Al₂O₃

Epitaxially grown Mo films on a faceted corundum (α-Al₂O₃) m plane were investigated by transmission electron microscopy. Low- and high-resolution images were taken from a cross-section specimen cut perpendicular to the facets. It was possible to identify unambiguously the crystallographic orientation of these facets and explain the considerable deviation (∼10°) of the experimental interfacet angle, as measured with atomic force microscopy (AFM), from the expected value. For the first time, proof is given for a smooth facet and a curvy facet with orientation near to . Moreover, the three-dimensional epitaxial relationship of an Mo film on a faceted corundum m surface was determined.