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Multilayer structures with short periods have been systematically investigated using a tunable soft X-ray synchrotron, BESSY II, and X-ray tube radiation. Multilayer X-ray mirrors of W/B4C, W/Sc, Mo/B4C, Mo/C, La/B4C, Cr/C and Cr/Sc, with periods from 0.8 nm to 3.5 nm and number of periods up to 300-400, were constructed and investigated. The high reflectivity and spectral resolution of the mirrors allow them to be used to create multimirror systems for X-ray diagnostics of high-temperature plasma, for X-ray astronomy and microscopy.

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