Figure 2
Side view of SHIN-MAC ONE. (1) cylindrical breathnite IP holder; (2) rotating laser head; (3) pulse motor and encoder for the rotating laser head; (4) He–Ne laser; (5) synchronized displacement system of the IP holder and the vacuum pump; (6) pulse motor for the displacement system; (7) vacuum pump; (8) vacuum connection between the IP holder vacuum chamber and the vacuum pump. |