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Figure 1
Schematic diagram of the experimental arrangement for large-area X-ray diffraction topography. The 300 mm-wide monochromatic X-ray beam obtained at a point 200 m from the bending-magnet source was used to acquire topographs of a large-diameter silicon wafer sample.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 9| Part 3| April 2002| Pages 166-168
doi:10.1107/S0909049502003448
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