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Figure 4
Step-scanned X-ray topographs: (a) the etched wafer (sample 3), (b) the ground wafer (sample 4), (c) the polished wafer A (sample 5A) and (d) the polished wafer B (sample 5B). The step interval was 5 arcsec for (a) and 10 arcsec for (b), (c) and (d). The arrow shows the diffraction vector g for all the topographs.

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