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Figure 5
Summary of the X-ray observation and clarified information about surface-strain distribution caused by various steps of the large-diameter silicon wafer manufacturing.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 9| Part 3| April 2002| Pages 166-168
doi:10.1107/S0909049502003448
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