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Figure 1
Swelling of PMMA under exposure. Maximum measured swelling ≃ 670 µm of 1 mm-thick PMMA CQ grade, not annealed, and irradiated using 90 × 90 µm wire-mesh mask, average current I = 193 mA, ring energy = 1.3 GeV, scan length = 1.25 cm (0.5″), scan velocity = 6.25 mm s−1 (0.25″ s−1). Dose at the resist bottom = 3 kJ cm−3.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 10| Part 3| April 2003| Pages 272-279
doi:10.1107/S0909049503005971
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